Ceramic targets
Ceramic targets are relatively brittle targets. Usually, ceramic targets are used together with a backing plate. In addition to supporting the ceramic target during the sputtering process, the backing plate can also play a role in heat transfer during the sputtering process. There are many types of ceramic targets and a wide range of applications, mainly used in the field of microelectronics, displays, storage and other fields. As the basic material for the development of non-metallic thin film industry, ceramic targets have achieved unprecedented development.