Silicon carbide base
Application
►It is used for the transmission of wafers in semiconductor manufacturing processes.
►In semiconductor manufacturing, an extremely thin wafer is placed on a silicon carbide vacuum sucker, connected to a vacuum generator, and fixed by vacuum suction.
►It can be used in lithography, etching, laser processing, wafer detection and other processes.
Features and advantages
►It has accurate size and thermal stability, good thermal conductivity and low expansion coefficient.
►High specific stiffness and excellent thermal uniformity, which is not easy to bend and deform after long-term use;
►It has smooth surface and good wear resistance, so as to safely handle the chip without particle pollution. The pore diameter is small and evenly distributed, and each area of the wafer can be uniformly adsorbed.
►The resistivity of SSiC silicon carbide is 106-108 Ω, and it is nonmagnetic, meeting the requirements of ESD specifications; It can prevent static electricity from accumulating on the chip surface.
►Excellent acid and alkali corrosion resistance
►Plasma impact resistance
Specification
Different shapes and sizes are produced according to the design drawings.
Product series of SSiC products
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SSiC product category |
Common product names |
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High precision components for semiconductor process and optical mechanical equipment |
SiC crystal boat, mechanical arm, SiC base, triangular support, SiC sucker, etc |
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Parts for glass forming |
SiC heating plate, SiC soaking plate, SiC mold, SiC mold sleeve |
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Bulletproof ceramic bricks and ceramic plates |
SSiC bulletproof insert plate, SSiC bulletproof piece, SSiC bulletproof block |
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Optical reflector components |
SSiC optical reflector |
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Fluid Control Series |
SSiC seal ring, SSiC nozzle, SSiC impeller, SSiC shaft sleeve, SSiC plunger rod |
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High temperature resistant parts |
SSiC burning rod, square beam and roller, SSiC crucible, SSiC burner sleeve, SSiC furnace tube, SSiC protective tube |
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Chemical corrosion resistant parts |
SSiC protective sleeve, SSiC nozzle, SSiC head, heat exchanger tube sheet, SSiC tube bundle block, SSiC heat exchange plate, SSiC heat exchange tube, SSiC heat exchange control block, SSiC heat exchange block, micro reaction module |
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Ion resistant etching parts |
SSiC CMP carrier, SSiC ICP carrier, SSiC PVD carrier, SSiC RTA carrier, SSiC carrier |
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Wear resistant parts |
SSiC grinding cylinder, SSiC wear-resistant pipe, SSiC wear-resistant brick, SSiC wear-resistant plate, SSiC sealing ring, SSiC sandblasting nozzle, SSiC nozzle, SSiC grinding ball, SSiC bolt and nut |
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SSiC bearing |
SSiC bearing, ceramic bearing ball |
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Microchannel reaction unit |
SSiC reaction plate, SSiC reaction tube, SSiC micro reaction module |
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SSiC tube |
Heat exchanger tube, heat exchanger ceramic tube |
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SSiC shaft sleeve |
SSiC bearing sleeve, SSiC precision ceramic bearing, SSiC shaft sleeve |
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Other customized products |
SSiC customized parts, SSiC customized ceramic parts |
