short description:

SiC products have excellent mechanical properties at room temperature, such as high strength, high hardness, high elastic modulus, etc. It also has excellent high temperature stability, such as high thermal conductivity and low thermal expansion coefficient, as well as good specific stiffness and optical processing performance. It is especially suitable for preparing precision ceramic structures for integrated circuit equipment such as lithography machine, such as precision moving worktable, framework, suction cup, water-cooled plate, precision measuring mirror, grating and other ceramic structures used in lithography machine. After years of technical breakthrough, KSINO has solved the problem of precision machining and products, such as large size, thin thickness, hollow structure and other complex SiC structural parts. This not only breaks through the technical bottleneck of the precision silicon carbide structural parts’ manufacturing technology, but also greatly promotes the localization of key structural parts for integrated circuit manufacturing equipment.